|
|
IRIS INSPECTION STATION
Description:
IRIS is an ergonomically designed visual inspection system capable of all optical techniques allowing for safe inspection of virtually any substrate. Incorporating the latest technology in robotic handling, the IRIS boasts stainless steel construction, to meet your class 100 clean room requirements.
|
Features: |
|
• NT based operating system |
|
• Programmable inspection recipes with infinite sites and number of recipes with random sampling features |
|
• Image archiving with annotation saved in TIFF |
|
• Realtime imaging on flat panel display and/or video monitor |
|
• Mirrored hard drive for reliable data storage |
|
• Programmable 8" x 8" stage |
|
• Safe robotic handling-no edge contact |
|
• Dual end-effector robot for high thru-put |
|
• Various substrate shapes, thickness and materials |
|
• Pre-alignment for 3" - 8" substrates, notch or flat alignment |
|
• Multiple cassettes-accept, reject (rework) |
|
• Substrate size changeable with no operator input |
|
• Class 1 laser scanner allows for quick and safe cassette mapping |
|
• 10 minutes 28 seconds thru-put for 25 6" wafers, 5 sites per wafer with 1 second dwell per site |
|
• Optical techniques include: brightfield, darkfield, DIC, and confocal |
|
• Magnification to 2,000X, .18 micron line/space resolution with confocal option |
|
• Built to SEMI S2 and S8 specifications |
|
|
Specifications |
|
|
Power requirements |
110 V A/C, 60 Hz, 15 Amp |
|
Vacuum Supply |
20 - 24 inch of Mercury |
|
Software |
Capable of controlling X-Y Stage, Autofocus, Robot Controller, Cassette Platform Switches, Stage Vacuum Sensor, and Stage Solenoid Valve. Video Camera will provide Image in "Video Window". |
|
Operating System |
Windows Based |
|
Safety Features |
EMO Switch (Emergency power off), 15 Amp Circuit Breaker capable to 10,000 Amp surge |
|
Computer |
Personal Computer (PC) based |
|
Monitor |
14.1 inch LCD flat panel (larger upon request) |
|
Keyboard |
P/S 2 style |
|
Mouse |
P/S 2 style |
|
Video Camera |
High Resolution 3 CCD Color Camera |
|
Stage |
8" X-Y travel |
|
Joystick |
3" handle, 2 buttons, High - Low Speed |
|
Stage Controller |
X axis, Y axis, Nosepiece Control |
|
Stage Vacuum Chuck |
2.5" Diameter Vacuum Chuck |
|
Microscope |
5X, 10X, 20X, 50X ELWD, and 100X ELWD Objectives (multiple options upon request) |
|
Robot Handling System |
Dual End-Effectors, Articulated Arm |
|
Laser Scanner |
Class 1 laser providing quick scanning of cassettes, capable of detecting substrates, misaligned substrates and missing substrates. |
|
Pre-aligner |
High Resolution Pre-aligner, Flat and Notch finding |
|
Auto-Focus |
Optional |
|
Cassette Platforms |
2 Platforms, each will accept 3" to 8" round or square, notch/flat finding, independent Cassette Switches |
|
Loading Time |
Less then 20 seconds (Cassette holder to Stage Chuck) |
|
Point to Point |
Less then 3 seconds (within Substrate) |
|
Unloading Time |
Less then 20 seconds (Stage Chuck to Cassette holder) |
|
Transfer Time |
Less then 10 seconds (swap Substrate from Stage Chuck to R1 or R2 End Effector) |
|
Scanning Time |
Less then 3 seconds per cassette |
|
Working Surface |
Stainless Steel, 300 series |
|
Weight |
750 pounds |
|
Size |
67.0" height, 58.4" width 36.0" depth |
|
Leveling Capacity |
1" |
For Sales information contact:
Micro Optics SEG
Semiconductor
Equipment Group
Contact:
Philip Weissman
68-23 Fresh Meadow Lane
Fresh
Meadows NY, 11365
Phone:
(718) 961-8833
Fax:
(718) 461-2904
