Brief
Description
The Shuttle is driven by a .9 deg stepping motor transferring torque by using a Polyurethane arimid fiber timing belt. Its Home and Transfer positions are located by a precession limit switch with an accuracy of 1 micron or 40 millionths of an inch. Software controlling the stepping motor usually count steps between both limits, then during actual use the movement of the transport will stop just shy of the limit switch, change it's velocity then move very slowly until it bumps the limit switch.
Specifications for Veritas 10 inch Shuttle
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Pin outs for rear connector (HD15 male conn.): |
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Pin # |
Description |
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1 |
Input, Motor, Phase A - |
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2 |
Input, Motor, Phase A + |
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3 |
Input, Ground |
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4 |
Input, Motor, Phase B - |
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5 |
Input, Motor, Phase B + |
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6 |
Not Used |
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7 |
Input, 5V |
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8 |
Output, Limit Switch, CCW, 0V at Transfer location, 5V off Transfer location, OR 0V if (transport "off" home limit and Stage is "in" transfer position) |
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9 |
Output, Limit Switch, CW, 0V at Home location, 5V off Home location |
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10 |
Input, 12V |
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11 |
Output, 12V, Power for SUNX Fiber Optic Sensor |
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12 |
Output, Ground, Power for SUNX Fiber Optic Sensor |
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13 |
Input, Stage Transfer Position Fiber Optic Sensor, 12V at position, 0V off position |
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14 |
Output, Stage Limit Trigger, 0V out- enable Stage Limits, 5V normal, 0V if (Stage is "in" transfer position and Transport is "off" home limit switch) |
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15 |
Output, Stage Transfer Position, 5V out at transfer position, 0V not at transfer position |
Stepping Motor
.9 deg step angle
2.4 volt motor voltage
.6 Amps current/phase
5 Ohms Resistance/phase
9 oz-in Holding Torque
Shuttle
Travel- 13.875 inches (350 mm)
Accuracy- 2 microns for Home or Transfer position
Maintenance- Annual belt tension adjustment
Vacuum
2.5" Vacuum Chuck for 8 inch Shuttle, Flatness .0001 inch or 2.5 microns
2.0" Vacuum Chuck for 6 inch Shuttle, Flatness .0001 inch or 2.5 microns
10" - 24" hg for reliable holding of substrate
Remote Vacuum sensors should be adjusted approximately 4" hg below Vacuum holding on Chuck.
Shuttle Logic (to determine if Shuttle Transport can be traversed to transfer/home positions)
Pin 8, Shuttle rear connector, Transfer Logic output:
5V only when:
1) Stage is at transfer location (pin 13 is high, 12V)
2) Shuttle Transport is not at transfer location (home position or off transfer switch)
0V when;
1) Stage is at transfer location (pin 13 is high, 12V)
2) Shuttle Transport is at transfer location
OR
1) Stage is not at transfer location (pin 13 is low, 0V)
2) Shuttle Transport is not at transfer location
OR
1) Stage is not at transfer location (pin 13 is low, 0V)
2) Shuttle Transport is at transfer location
Pin 14, Shuttle rear connector, Stage limit switch engagement circuit output:
0V only when;
1) Stage is in transfer location (pin 13 is high, 12V)
2) Shuttle Transport is not at home location (extended position or off home switch)
5V when;
1) Stage is at transfer location (pin 13 is high, 12V)
2) Shuttle Transport is at home location
OR
1) Stage is not at transfer location (pin 13 is low, 0V)
2) Shuttle Transport is not at home location
OR
1) Stage is not at transfer location (pin 13 is low, 0V)
2) Shuttle Transport is at home location